微电子机械系统下一波硅革命

2020-02-27 219浏览

  • 1.微电子机械系统—下一波硅革命MEMS:the Next Wave Silicon Revolution Dr. Tao Wu 吴涛 wutao@shanghaitech.edu.cnOffice:SIST Bldg 2-202.DCourseWeb:http://10.15.21.20Website:http://small.shanghaitech.edu.cn
  • 2.什么是MEMS？
  • 3.What are MEMS? • Micro(small)http://eed.gsfc.nasa.gov/562/SA_MEMs.htm• Electro(electric components/functionality)http://www.memx.com/'>http://www.memx.com/